structure for temperatursensorer and infrared detectors in the form of thermal detectors.

摘要

Structure for temperature sensors and infrared detectors in the form of thermal detectors arranged on a substrate (2) comprising a thermistor layer (3), the resistance of which is temperature dependent, and comprising one electric contact layer (4,5) on both respective sides of the thermistor layer (3), between which contact layers the resistance is to be measured, wherein the thermistor layer (3) is constituted by a monocrystalline quantum well structure comprising alternating quantum well layers and barrier layers, wherein the substrate (2) is constituted by a sheet of silicon, wherein the quantum well layers are of silicon germanium, SiGe, and wherein the barrier layers are of non-doped or low-doped silicon, Si, and wherein between both said contact layers (4,5) and the thermistor layer (3) there is arranged a buffer layer (8,9) of silicon, Si, arranged to prevent the contact layers (4,5) to overfill the quantum wells in the thermistor layer (3). The invention is characterised in that the contact layers (4,5) are p-doped and in that the quantum well structure is n-doped or non-doped, and in that the buffer layers are n-doped