Infrared Detector Research Metal Film Bolometer Detectors. Part 3. Preparation and Performance

摘要

This report describes the preparation and performance of metal film bolometer infrared detectors using a versatile fabrication technology for both single-element detectors and focal plane arrays. Detectors are prepared on conventional semiconductor-grade silicon substrates and extensive use is made of state-of-the-art microcircuit manufacture techniques. A detectivity of approx. 2 x 10 to the 8th power cm. sq. root of Hz. per watt and speed of response of < or = to 1 ms can be achieved, for detector element sizes as small as 50 micrometers. 'Recipients are warned that information contained in this document may be protected by patent rights'. (Author)