PASSIVATION LAYER FOR WAFER BASED SOLAR CELLS AND METHOD OF MANUFACTURING THEREOF

摘要

A solar cell module layer stack is described. The layer stack includes a doped silicon wafer substrate 101, a back contact layer 104 for the solar cell module, and a first sputtered and annealed passivation layer 112 between the wafer substrate and the back contact layer, wherein the passivation layer is selected from the group consisting of: an aluminum containing oxide layer, an aluminum containing nitride layer, an aluminum containing oxynitride layer, and mixtures thereof.