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PROCESS FOR PRODUCING SINGLE-CRYSTAL SAPPHIRE, AND SINGLE-CRYSTAL SAPPHIRE SUBSTRATE

机译:制作单晶蓝宝石和单晶蓝宝石基板的过程

摘要

A process for producing a sapphire ingot includes: a heating step (S101) in the solid phase in which solid aluminum oxide (alumina) filled in a crucible in a heating furnace is heated and held at a temperature less than the melting point (2050°C); a melting step (S102) in which the aluminum oxide in the crucible is melted; a heating step (S103) in the liquid phase in which the aluminum oxide is heated and held at a temperature higher than the melting point thereof; a shoulder-part formation step (S105) in which a seed crystal is pulled up while being rotated to form a shoulder part beneath the seed crystal; and a straight-part formation step (S106) in which the shoulder-part is pulled up while being rotated via the seed crystal while the lower end part of the shoulder-part is kept in contact with the alumina melt to form a straight part beneath the shoulder part. Thus, a process for producing a single-crystal sapphire substrate with few metal impurities and crystal defects (air bubbles), and a single-crystal sapphire substrate are provided.
机译:蓝宝石锭的制造方法包括:在固相中的加热步骤(S101),其中将填充在加热炉中的坩埚中的固体氧化铝(氧化铝)加热并保持在低于熔点(2050°)的温度下。 C);熔融步骤(S102),将坩埚中的氧化铝熔融。在液相中加热氧化铝的加热步骤(S103)并保持在高于其熔点的温度下;肩部形成步骤(S105),其中籽晶在旋转的同时被提起以在籽晶下方形成肩部;直线部形成工序(S106),在使肩部经由晶种旋转的同时将肩部上拉,同时使肩部的下端部与氧化铝熔液接触而在下方形成笔直部。肩部。因此,提供了一种用于制造金属杂质少且晶体缺陷(气泡)少的单晶蓝宝石基板的方法以及单晶蓝宝石基板。

著录项

  • 公开/公告号WO2012008208A1

    专利类型

  • 公开/公告日2012-01-19

    原文格式PDF

  • 申请/专利权人 SHOWA DENKO K.K.;SHONAI TOMOHIRO;

    申请/专利号WO2011JP60642

  • 发明设计人 SHONAI TOMOHIRO;

    申请日2011-05-09

  • 分类号C30B29/20;C30B15/04;

  • 国家 WO

  • 入库时间 2022-08-21 17:18:17

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