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PROCESS FOR PRODUCING SINGLE-CRYSTAL SAPPHIRE, AND SINGLE-CRYSTAL SAPPHIRE SUBSTRATE
PROCESS FOR PRODUCING SINGLE-CRYSTAL SAPPHIRE, AND SINGLE-CRYSTAL SAPPHIRE SUBSTRATE
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机译:制作单晶蓝宝石和单晶蓝宝石基板的过程
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摘要
A process for producing a sapphire ingot includes: a heating step (S101) in the solid phase in which solid aluminum oxide (alumina) filled in a crucible in a heating furnace is heated and held at a temperature less than the melting point (2050°C); a melting step (S102) in which the aluminum oxide in the crucible is melted; a heating step (S103) in the liquid phase in which the aluminum oxide is heated and held at a temperature higher than the melting point thereof; a shoulder-part formation step (S105) in which a seed crystal is pulled up while being rotated to form a shoulder part beneath the seed crystal; and a straight-part formation step (S106) in which the shoulder-part is pulled up while being rotated via the seed crystal while the lower end part of the shoulder-part is kept in contact with the alumina melt to form a straight part beneath the shoulder part. Thus, a process for producing a single-crystal sapphire substrate with few metal impurities and crystal defects (air bubbles), and a single-crystal sapphire substrate are provided.
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