METHOD FOR MANUFACTURING A TANDEM SOLAR CELL WITH MICROCRYSTALLINE ABSORBER LAYER

摘要

A tandem solar cell comprising an amorphous top cell and a microcrystalline bottom cell is described, wherein the plasma deposition of the microcrystalline absorber of the bottom cell is being performed in at least two steps, with the RF power density per flow unit of precursor gas in the second step being chosen to be lower than in the first step whilst the flow ratios of diluent and precursor are being kept constant.