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MULLITE SINTERED OBJECT AND CIRCUIT BOARD USING THE SAME, AND PROBE CARD

机译:使用相同的和探针卡的莫来石烧结物体和电路板

摘要

[Problem] To provide a mullite sintered object with excellent chemical resistance, a circuit board using the same, and a probe card on which the circuit board has been applied. [Solution] A mullite sintered object with excellent chemical resistance is obtained, in which the amount of mullite contained is 79.3 to 85.2 wt.%, the amount of aluminum contained is 14.2 to 19.8 wt.% and the amount of MnTiO3 contained is 0.6 to 1.15 wt.%, by adopting a relative density of no less than 96%. By adopting this mullite sintered object as an insulating base (11), a circuit board and a probe card can be obtained that are compact and without irregularities, and in which, during heat load testing, there is little displacement between a measurement terminal provided on the ceramic circuit board for use in the probe card and a measurement pad that is formed on the surface of a Si wafer.
机译:[问题]为了提供具有优异的耐化学性的莫来石烧结体,使用该莫来石烧结体的电路板以及在其上已经应用了该电路板的探针卡。 [解决方案]获得具有优异的耐化学性的莫来石烧结体,其中,莫来石的含量为79.3〜85.2wt。%,铝的含量为14.2〜19.8wt。%,MnTiO 3的含量通过采用不小于96%的相对密度,所含的为0.6至1.15重量%。通过将该富铝红柱石烧结体用作绝缘基体(11),可以获得紧凑且无凹凸的电路板和探针卡,并且在热负荷测试期间,设置在其上的测量端子之间几乎没有位移。用于探针卡的陶瓷电路板和在Si晶片表面上形成的测量垫。

著录项

  • 公开/公告号WO2012043658A1

    专利类型

  • 公开/公告日2012-04-05

    原文格式PDF

  • 申请/专利权人 KYOCERA CORPORATION;FURUKUBOYUYA;NAKAYAMATORU;

    申请/专利号WO2011JP72246

  • 发明设计人 FURUKUBOYUYA;NAKAYAMATORU;

    申请日2011-09-28

  • 分类号C04B35/18;G01R1/073;G01R31/26;H01L21/66;H05K3/46;

  • 国家 WO

  • 入库时间 2022-08-21 17:16:47

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