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PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF TRICHLOROSILANE IN A FLUIDIZED BED REACTOR
PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF TRICHLOROSILANE IN A FLUIDIZED BED REACTOR
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机译:在流化床反应器中三氯硅烷的热分解制备多晶硅。
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摘要
Processes for producing polycrystalline silicon by thermal decomposition of trichlorosilane are disclosed. The processes generally involve thermal decomposition of trichlorosilane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.
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