PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF SILANE IN A FLUIDIZED BED REACTOR

摘要

Disclosed herein is a method for producing polycrystalline silicon by thermal decomposition of silane. The method of the present invention generally involves the thermal decomposition of silane in a fluidized bed reactor operated under reaction conditions that provide a higher percentage of productivity compared to conventional manufacturing methods.