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PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF SILANE IN A FLUIDIZED BED REACTOR
PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF SILANE IN A FLUIDIZED BED REACTOR
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机译:在流化床反应器中硅烷的热分解制备多晶硅。
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摘要
Disclosed herein are methods for producing polycrystalline silicon by thermal decomposition of silanes. The process of the present invention generally involves thermal decomposition of silane in a fluidized bed reactor operated at reaction conditions that provide a higher rate of productivity compared to conventional manufacturing methods.
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