MEMS Mirror, Mirror Scanner, Optical Scanning Unit and Image Forming Apparatus including the Optical Scanning Unit

摘要

Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.