REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION METHOD

摘要

Provided is a reflection high-energy electron diffraction method that is capable of generating a reflection electron diffraction pattern using an electron beam having an extremely small emission current, in the nanoampere range. In said method, microchannel plates (17a and 17b) that amplify the current of reflected electrons are arranged directly in front of a fluorescent screen (18), an electron beam (28) having an emission current of 1 to 1,000 nA is fired by an electron gun (15) towards the surface of a thin film, reflected electrons current-amplified by the microchannel plates (17a and 17b) are incident upon the fluorescent screen (18), and a reflection electron diffraction pattern produced by the reflected electrons appears on the fluorescent screen (18).