METHOD OF CONTINUOUSLY PRODUCING TETRAFLUOROSILANE BY USING VARIOUS FLUORINATED MATERIALS, AMORPHOUS SILICA AND SULFURIC ACID

摘要

The present invention relates to a method of continuously producing tetrafluorosilane (SiF₄) by using various fluorinated materials, amorphous silica (SiO₂) and sulfuric acid (H₂SO₄). According to the present invention, the yield of tetrafluorosilane can increase and it can be continuously produced in an environmentally friendly manner with low cost. In addition, the amount of hydrogen fluoride generated during the reaction is minimized and thus the corrosion of devices can be minimized, and the pipeline blockage and yield decrease of SiF₄ can be prevented by passing the reaction product which is a mixture gas of SiF₄ and water through an H₂SO₄ scrubber at a high temperature to remove water, which can prevent the generation of silica gel and hexafluorosilicic acid by the side-reaction of condensed water and SiF₄.