MANUFACTURING METHOD OF SILICON CARBIDE NANOPOWDER AND SILICON CARBIDE NANOPOWDER MANUFACTURED BY THE METHOD

摘要

PURPOSE: A method for manufacturing silicon carbide nano-powder and the silicon carbide nano-powder are provided to mass-produce the silicon carbide nano-powder through a simple process using a silicon-carbon precursor. CONSTITUTION: A method for manufacturing silicon carbide nano-powder includes the following: Gas is pumped to move successively through the reactor, the cyclone, and the collector of a thermal plasma device. Plasma is generated from an induction coil region by spraying plasma source gas from a plasma torch to the reactor. Quenching gas is injected from the upper side of the reactor to the end part of a plasma generating region. A silicon-carbon precursor passes through the plasma generation region. Silicon carbide nano-powder is synthesized and is quenched. The quenched silicon carbine nano-powder is collected.