LITHOGRAPHIC APPARATUS FOR INCREASING THE STABLE OPERATING RANGE OF ACTIVE DAMPING, PROJECTION ASSEMBLY, AND ACTIVE DAMPING

摘要

PURPOSE: A lithographic apparatus, projection assembly, and active damping are provided to promote the stable operation of an active damping system by designing a roll-off frequency of tan elasticity connector to be lower than a bandwidth of an active damping system.;CONSTITUTION: A lighting system(IL) is formed to condition a radiation beam(B). A supporter(MT) supports a patterning device(MA) which provides a pattern to a cross section of a radiation beam. A substrate table(WT) is formed to keep a substrate. A projection system(PS) is formed to project a patterned radiation beam on a target part of the substrate. An active damping system damps vibration in an entire part or a part of the projection system.;COPYRIGHT KIPO 2012