METHOD FOR FORMING A MICROCRYSTALLINE SEMICONDUCTOR FILM CAPABLE OF IMPROVING ELECTRIC FIELD EFFECT MOBILITY AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

摘要

PURPOSE: A method for forming a microcrystalline semiconductor film is provided to offer a microcrystalline semiconductor film having an improved crystalline by reducing a gap of mixed particles.;CONSTITUTION: An insulating layer(55) is formed on a substrate(51). A seed crystal(57) is formed on the insulating layer. A gap(57b) is formed between mixed particles(57a) which are contiguous to the seed crystal. A microcrystal semiconductor film(59) is formed on the seed crystal. The seed crystal and the microcrystal semiconductor film are made of the microcrystal semiconductor.;COPYRIGHT KIPO 2012