FILM TYPE PROBE DEVICE CAPABLE OF REMARKABLY REDDUCING THE INCIDENCE OF TROUBLE

摘要

PURPOSE: A film type probe device is provided to reduce the number of components by fixing the location of a moving body from a fixed body, thereby reducing costs.;CONSTITUTION: A fixed body(110) is fixed to a stage. A position control screw fixes a moving body to a predetermined location of the fixed body. The position control screw passes through a long hole formed on the mobbing body. A body block(130) comprises a buffer member(131). The body block is fixed to the bottom of the moving body. A probe sheet(132) comprises a wire pattern in an insulating film. The wire pattern contacts with a test material. The insulating film is fixed to the bottom of the body block. A guide groove is formed on either the moving body or the fixed body.;COPYRIGHT KIPO 2012