OPTICAL BEAM DEFLECTING ELEMENT AND METHOD OF ADJUSTMENT

摘要

Beam optical beam deflecting element (BDE) for pre-create a radiation beam with a light beam according to a limited angular distribution by changing the angular distribution of the rays of the radiation beam incident on the deflecting arrangement, beam angle within the pre-defined distribution of the light beam angle the first biasing structure has a respective propagation direction corresponding, disposed in the first deflection region (DR1) for generating a first linear velocity of the first light beam having a first intensity of the first intensity distribution in; And the first and offset in a lateral direction on the deflection zone, as a second biasing structure is disposed in the second deflection region (DR2) for generating a second linear velocity of the second light beam, beam angle within the pre-defined distribution of the light beam angle It has a direction of propagation corresponding to each, the first intensity distribution and comprises a second biasing structure to generate a second linear velocity of the second light beam having a second intensity in accordance with the second different intensity distribution. Beam deflecting device, the shape of the illuminated area in the pupil plane of the illumination system, without substantially changing the size and the position, in the illumination system to change the energy distribution within a predetermined spatial intensity distribution at the pupil plane (P _ILL) as the energy distribution of the manipulator can be used effectively. ;