METHOD OF MANUFACTURING ZNO BASED THIN FILM FOR TRANSPARENT ELECTRODE AND ZNO BASED THIN FILM FOR TRANSPARENT ELECTRODE BY THE METHOD

摘要

PURPOSE: A method of manufacturing a ZnO based thin film for a transparent electrode and a ZnO based thin film for a transparent electrode manufactured by the method are provided to obtain a ZnO based thin film with improved conductivity and transmittance in a long wavelength band. CONSTITUTION: A method of manufacturing a ZnO based thin film for a transparent electrode comprises the steps of: forming a ZnO film doped with dopant on a transparent substrate and rapidly heat-treating the ZnO thin film. The ZnO thin film is formed by selected one of pulse laser deposition, sputtering, spray coating, CVD coating, evaporation, and molecular beam epitaxy.