IMPRINTING RELEASE LAYER COATER WITH STAMP FOR A NANO/MICRO OPTICAL DEVICE, CAPABLE OF SELECTING AN OPTIMUM PROCESS ACCORDING TO THE PATTERN FORMATION OF A STAMP

摘要

PURPOSE: An imprinting release layer coater with stamp for a nano/micro optical device is provided to improve the processing lifetime of a stamp by effectively coating self-assembled monolayers on the inside of the stamp pattern through vapor deposition.;CONSTITUTION: A heater(11) heats the inside of a chamber(10). A stamp holder(20) is inside of the chamber and supports the stamp. The stamp holder comprises a stamp fixing plate(21) and a stamp holding fixture(22). A first feed unit(30) communicates with the chamber to induce phase-changed steam into the chamber. A carrier gas feeder(40) supplies a carrier gas into the chamber.;COPYRIGHT KIPO 2012