Effusion cell with side orifice, the method of manufacturing effusion cell with side orifice and evaporator

摘要

The present invention relates to a side emission type evaporation source, a manufacturing method thereof and an evaporator. In an evaporation system using a method of heating a crucible in a vacuum and depositing material emitted from the crucible onto a substrate, an evaporation source comprising a crucible and a heat generating portion and having an outlet formed on the side of the crucible, a method of manufacturing the evaporation source, and an evaporator It is about. According to the present invention, a PBN crucible for an evaporator, a heating part deposited on an outer surface of the crucible and patterned to be suitable for heating, a discharge port formed on the side of the crucible, a PBN lid covering an upper portion of the crucible, and An evaporation source, a manufacturing method thereof, and an evaporator including an exothermic portion deposited on an outer surface and patterned for heating, are provided.