Linear effusion cell with side orifice array, the method of manufacturing linear effusion cell with side orifice array and evaporator

摘要

aspect the present invention release the linear evaporation source , the present invention relates to a manufacturing method thereof and a linear evaporator . by heating the crucible in a vacuum , in the evaporation system using a method of depositing a material to be released from the crucible to the substrate , the linear evaporation source composed of a crucible and heat, having the outlet formed in the side of the evaporation sources , the linear relates to a production method of the evaporation source and the linear evaporator . the present invention, and PBN emitting portion for evaporation apparatus , the release portion is deposited on the outer surface of the heat generating portion and suitably patterned on heating , formed in said discharge portion side linear evaporation source including a plurality of vent ports , its manufacturing method and the linear evaporator is provided . ;