PROCESSING CHAMBER FOR SUBSTRATE MANUFACTURE CAPABLE OF IMPROVING PRODUCTIVITY AND EFFECTIVENESS OF A SUBSTRATE FABRICATION PROCESS

摘要

PURPOSE: A processing chamber for substrate manufacture is provided to miniaturize the structure of the processing chamber for substrate manufacture by forming a rotation support plate as a thin disc shape having one or more ribs.;CONSTITUTION: A substrate support part(110) is located in the center of a processing chamber(100). The substrate support part supports a substrate(S). A first spraying nozzle part(120) includes a developer nozzle spray hole spraying a developer, and a stripping liquor nozzle spray hole spraying stripping liquor. The first spraying nozzle part is installed on one side of the substrate support part to be possible to move to a vertical direction. A second spraying nozzle part(130) comprises an etchant nozzle spray hole spraying an etchant, and a rinse liquid nozzle spray hole spraying a rinse liquid.;COPYRIGHT KIPO 2012