SPIN CHUCK FOR MANUFACTURING A SUBSTRATE CAPABLE OF IMPROVING ACCURACY AND EFFICIENCY OF A SUBSTRATE FABRICATION PROCESS

摘要

PURPOSE: A spin chuck for manufacturing a substrate is provided to miniaturize a touch panel manufacturing device by arranging processing chambers, which are required for the touch panel manufacturing process, in the structure of a spin track.;CONSTITUTION: A rotation support plate(110) is rotatably installed inside a processing chamber and has a thin disc shape. A plurality of support pins(120) is fixed to the upper side of the rotation support plate and supports the lower surface or the side of a substrate. A spin cup is formed to wrap the surround of the rotation support plate and prevents drug solution or washing solution, which is sprayed to a substrate, from being sprayed to the outside. A driving part of the rotation support plate(140) is connected to the central part of the rotation support plate and drives the rotation support plate. The upper side of a lower bowl is opened, an exterior wall is formed to wrap the surround of the rotation support plate, and a penetration hole is formed to connect to the driving part of the rotation support plate in the lower surface of the lower bowl. The upper side of an upper cover is opened and the upper cover supplies a space to accommodate the rotation support plate inside. The settling portion of the rotation support plate is combined with the penetration hole and is rotatably combined with the rotation support plate.;COPYRIGHT KIPO 2011