NOVEL COMPOUNDS, METHOD OF PRODUCTION THESE NOVEL COMPOUNDS, MATERIALS FOR Al RELATED FILMS, METHODS OF Al RELATED FILMS AND Al RELATED FILMS

摘要

PPROBLEM TO BE SOLVED: To provide a technology for forming uniform Al film, particularly on the bottom faces of holes or grooves with few troubles even in the case of large-scale pre-production, since the stability of the process is greatly improved. PSOLUTION: The compound is represented by general formula [I] CHSB3/SBAlHSB2/SB:L (wherein L is an alkylamine). PCOPYRIGHT: (C)2006,JPO&NCIPI