WAFER UV IRRADIATION DEVICE IRRADIATING ULTRAVIOLET RAYS TO A WAFER LOADED ON A TOP TRANSFER UNIT AND A BOTTOM TRANSFER UNIT

摘要

PURPOSE: A wafer UV irradiation device is provided to improve productivity and work efficiency by controlling a wafer installing unit of a top transfer unit using a rotating device.;CONSTITUTION: A UV irradiation device body(10) includes an upper part and a lower part. A bottom transfer unit is movably installed in the lower part of the UV irradiation device body. A top transfer unit(50) is movably installed in the upper part of the UV irradiation device body. A UV lamp emits ultraviolet rays to a wafer loaded on the top transfer unit and the bottom transfer unit. A rotating device rotates a wafer installing unit(51).;COPYRIGHT KIPO 2013