Optical imaging system for imaging pattern on image area of imaging system, has object area and multiple reflectors having reflecting surface with reflective layer arrangement

摘要

The optical imaging system has an object area and multiple reflectors having a reflecting surface with a reflective layer arrangement. The reflector surfaces are arranged in a beam path between the object area and the image area. An image layer is radiated from an incidence angular area that is provided for the reflector. A barrier layer is made of a material, particularly boron carbide, carbon, silicon nitride, silicon carbide, silicon boride, molybdenum nitride, molybdenum carbide, molybdenum boride, ruthenium nitride, ruthenium carbide or ruthenium boride.