Optical element for optical device e.g. projection exposure apparatus, has optically active element that is formed from silicon, and cooling element that is formed of silicon carbide or siliconized silicon carbide

摘要

The optical element has optically active element (8) which is subjected to a working light to the optical device. A cooling element (9) dissipates heat which is generated by the working light at the optically active element. The optically active element is formed from silicon. The cooling element is formed of silicon carbide (SiC) or siliconized silicon carbide (SiSiC).