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Transistor with embedded si/ge material having enhanced boron confinement
Transistor with embedded si/ge material having enhanced boron confinement
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机译:嵌入式硅/锗材料具有增强的硼约束的晶体管
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摘要
By combining diffusion barrier substance (256A) in related can unevenly reduce that the p channel transistor of neighbouring PN junction includes silicon/germanium alloy, (255) diffusion PN junction, so as to cause enhancing device stability and enhance the performance of bulk crystal pipe, the advantages that diffusion barrier substance (256A) can provide the carbon of form, nitrogen.
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