EVALUATION METHOD OF POLYMER FOR SEMICONDUCTOR LITHOGRAPHY, AND MANUFACTURING METHOD OF POLYMER FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING THE EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method capable of evaluating solubility of a polymer for lithography to a solvent simply with high accuracy.SOLUTION: An evaluation method of a polymer for semiconductor lithography includes the following steps of: (1) preparing a test solution containing a polymer for semiconductor lithography, a good solvent of the polymer, and a poor solvent of the polymer; and (2) measuring turbidity or transmittance of the test solution. The measurement of turbidity or transmittance is performed by using a sealed or substantially sealed measurement container.