DUST ADHESION PREVENTING JIG OF REFLECTIVE PHOTOMASK, FITTING METHOD THEREFOR, FITTING DEVICE THEREFOR, AND STORAGE DEVICE OF REFLECTIVE PHOTOMASK

摘要

PROBLEM TO BE SOLVED: To provide a dust adhesion preventing jig for a reflective photomask which never contaminates the photomask, and to provide a fitting method therefor, a fitting device therefor, and a storage device of a reflective photomask.;SOLUTION: The dust adhesion preventing jig for housing a reflective photomask having a pattern on one surface and preventing adhesion of dust to the pattern includes a frame consisting of a proximal part covering the circumferential end face of one surface of the reflective photomask and a sidewall covering the side surface of the reflective photomask, and a protective film provided at the proximal part of the frame so as to cover the pattern of the reflective photomask while spaced apart by a predetermined distance. Upper end of the sidewall of the frame is fixed by a fixing member together with the other surface of the reflective photomask.;COPYRIGHT: (C)2013,JPO&INPIT