ARRAY GENERATION METHOD AND ARRAY GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an array generation method and an array generation device for not changing a processing order of modules that should not be changed, and not largely changing a supply order.;SOLUTION: A discharge restriction defining allowable lead time when processing of a processing object sample precedes for a preceding sample supplied prior to the processing object sample in prescribed processing is stored in a setting data storage unit 121. An array generation device includes a detailed route generation unit 113 for comparing the completion time of the processing of a check point in the processing object sample and the preceding sample, and when the processing object sample precedes the preceding sample, deleting a detailed route of the processing object sample for which the time difference is greater than the allowable lead time defined in the discharge restriction.;COPYRIGHT: (C)2013,JPO&INPIT