TWO-AXIS DRIVE MECHANISM, DIE BONDER AND METHOD FOR DRIVING DIE BONDER

摘要

PROBLEM TO BE SOLVED: To provide a two-axis drive mechanism which prevents dropping of a lifting shaft of a linear motor at the time of power loss and includes a highly reliable lifting shaft, a highly reliable die bonder using the same and a method for driving the die bonder.;SOLUTION: A two-axis drive mechanism includes: a processing part; a two-axis drive shaft which includes a first liner motor part having a first moving part vertically moving the processing part along a first linear guide and a first fixing part and a second linear motor part having a second moving part moving the processing part in a horizontal direction perpendicular to the direction of vertically moving the processing part and a second fixing part; a main power source supplying power to the two-axis drive shaft; and lifting shaft dropping prevention means which prevents a moving part of the die from dropping at the time of power loss of the main power source.;COPYRIGHT: (C)2013,JPO&INPIT