POLISHING BODY, AND POLISHING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a polishing body capable of sufficiently preventing the surface of a material to be polished from being injured, and to provide a polishing method using the polishing body.;SOLUTION: The polishing body 10 has a polishing surface 10a and grooves 11 formed on the polishing surface 10a. The grooves 11 are each formed by: a pair of edge parts 12a, 12b which exist on the polishing surface 10a and form an opening 13 of the groove 11; a bottom part 14 extended along the edge parts 12a, 12b; an inclined surface 15a which connects the bottom part 14 to the edge part 12a and is inclined toward the polishing surface 10a; and the another inclined surface 15b which connects the bottom part 14 to the edge part 12b and is inclined toward the polishing surface 10a. Angles, formed by the polishing surface 10a, and each of the inclined surfaces 15a and each of inclined surfaces 15b, are obtuse angles, respectively.;COPYRIGHT: (C)2013,JPO&INPIT