DEFECT INSPECTION METHOD FOR PERIODIC PATTERN AND DEFECT INSPECTION DEVICE FOR PERIODIC PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection method and defect inspection device for a periodic pattern which are all automatic.;SOLUTION: The defect inspection method and defect inspection device for a periodic pattern comprise: a defect sorting process which, with respect to defects extracted by performing defect extraction processing for extracting defect points by determining size of the defect and position information according to a binary image obtained in a binarization processing process after performing concentration comparison difference process and the binarization processing with respect to image data acquired, compares luminance value of images of a plurality of pixels away in a specific direction just for arbitrary pitch and sorts out defect modes to be the defect kind according to a predetermined determination criterion; and a defect kind classifying process for classifying differences of luminance value every defect sorted out in the defect sorting process; a quality determination process for performing quality determination according to a preset quality determination criterion with respect to a result of determination about all the defects obtained in the defect mode-specific classifying process.;COPYRIGHT: (C)2013,JPO&INPIT