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Cover wafer or structural element-cover, wafer structural part or structural element usable for microtechnology, and corresponding wafer-part or structural element-part soldering method
Cover wafer or structural element-cover, wafer structural part or structural element usable for microtechnology, and corresponding wafer-part or structural element-part soldering method
The invention relates to a cover wafer with a core and with an inside, whereby the inside has one or more annular outer areas, (an) annular area(s), which inwardly adjoin(s) the outer area(s), and has (a) inner area(s), and to a component cover with only one annular outer area on its inside. The invention is characterized in that at least area(s) has/have a buffer layer, which has a wetting angle of 35° for a metallic eutectic solution that melts in a range of 265° C. to 450° C. The invention also relates to a component cover having one of the areas which has said buffer layer in a comparable manner. The invention additionally relates to a wafer component or to a component, which can be inserted using microsystem technology and which has a cover wafer or component cover applied with the aid of a solder material, and to a method for the production thereof.
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