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Ultraprecise machine tool

机译:超精密机床

摘要

A five axis motion controlled ultra-precision machine tool is provided in which major portions are composed as a structure completely symmetric about the machining point and errors due to thermal displacement can be minimized. A pair of Y axis guide members (41,41) are secured to the top face of a base (i) at both sides of an X axis slider (3) interposed therebetween for X direction so as to movably guide Y axis sliders (4,4) in horizontal Y direction perpendicular to X axis. Y axis linear motors (42,42) and the Y axis guide members (41,41) are disposed substantially at the center of mass of the Y axis sliders (4,4) respectively and so that the Y axis sliders (4,4) can be driven in Y direction with vibration and errors in alignment minimized.
机译:提供一种五轴运动控制的超精密机床,其中主要部分被构成为关于加工点完全对称的结构,并且可以使由于热位移引起的误差最小。一对Y轴引导构件(41,41)在X轴滑动器(3)的两侧沿X方向固定在基座(i)的顶面上,从而可移动地引导Y轴滑动器(4)。 ,4)在垂直于X轴的水平Y方向上。 Y轴线性电动机(42,42)和Y轴引导部件(41,41)分别大致设置在Y轴滑动器(4,4)的质量中心,从而Y轴滑动器(4,4) )可以在Y方向上驱动,并且振动和对准误差最小。

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