One of the ultra-precision machining methods was adapted for brittle material as well as soft material by using multi-arrayed diamond tips and high speed spindle. Conventional machining method is too hard to control surface roughness and surface texture against brittle material because the particles of grinding tools are irregular size and material can be fragile. Therefore, we were able to design tool paths and machine controlled pattern on surface by multi-arrayed diamond tips with uniform size made in MEMS fabrication and high speed spindle, and the maximum speed was about 3×105 r/min. We defined several parameters that can affect the machining surface. Those were multi-array of diamond tips (n×n), speed of air spindle and feeding rate. The surface roughness and surface texture can be controlled by those parameters for micro machining.
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机译：通过使用多排列的金刚石尖端和高速主轴，适用于脆性材料以及软材料之一。传统的加工方法太难以控制表面粗糙度和抗脆性材料的表面纹理，因为研磨工具的颗粒是不规则的尺寸和材料可以是脆弱的。因此，我们能够通过在MEMS制造和高速主轴中具有均匀尺寸的多排列金刚石尖端设计刀具路径和机器控制图案，并且最大速度为约3×105 r / min。我们定义了几种可能影响加工表面的参数。那些是多阵列金刚石尖端（n×n），空气轴的速度和饲养速度。表面粗糙度和表面纹理可以通过用于微机械加工的这些参数来控制。
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