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Coating liquid for forming low dielectric constant amorphous silica film and low dielectric constant amorphous silica film obtained from the coating liquid
Coating liquid for forming low dielectric constant amorphous silica film and low dielectric constant amorphous silica film obtained from the coating liquid
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机译:用于形成低介电常数非晶态二氧化硅膜的涂布液和由该涂布液获得的低介电常数非晶态二氧化硅膜
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摘要
A coating liquid for forming a low dielectric constant amorphous silica-based coating film with a dielectric constant of 3.0 or below and a film strength (Young's modulus) of 3.0 GPa or more, and also having a smooth surface with an excellent hydrophobicity. The coating liquid contains (1) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA) and alcoxysilane (AS) in the presence of tetraalkylammoniumhydroxide (TAAOH), or (2) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA), alcoxysilane (AS) and tetraalkylorthosilicate (TAOS) in the presence of tetraalkylammoniumhydroxide (TAAOH).
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