Air floating type substrate transfer apparatus (1), a plurality of maintaining the state of being arranged in parallel with each other at a predetermined interval in the direction perpendicular to the conveying direction, is floated (10) substrate by ejecting air I has a transport unit to be sent to the conveying direction (10) a substrate support portion (3), are emerging in the upper support portion (3) and (6). The air floating type substrate transfer apparatus (1), conveying unit (6) in a state of being floated on the upper support portion (3), the substrate sent in a predetermined position (10), the substrate (10) I have a drive unit that rotates as the rotation about the center of the (9). At least a part of the position between the support portion corners of the substrate (10) when (10) is rotating substrate passes in the predetermined position, adjacent (3) each other, I will support substrate (10) (14) is provided Borubea. By such a configuration, it is possible to improve the yield of products and to prevent the crack (10) or substrate scratches occur.
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