During the substrate exchange in the immersion lithography machine, adjoining the immersion fluid to the optical assembly, the device and the mannered null optical

摘要

The device and method keep the immersion liquid in the space where it adjoins to the optical assembly. The optical assembly, adjoining to the optical assembly with the baseplate table, on the baseplate which is supported, projects the image. The insertion possible insertion component, divides the immersion liquid, into the optical assembly and the 1st part and the insertion component and the baseplate, the baseplate table or is arranged with those both the 2nd part which are arranged between the insertion component in the optical assembly and the baseplate, the baseplate table, or inside the space with those both. The insertion component when moving separated from the arrangement which the baseplate adjoins to the optical assembly, keeps the contact with the 1st part of the optical assembly.