Through the void to the diaphragm and this diaphragm which the electrostatic die actuator, included the production mannered null diaphragm electrode

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which is equipped with a uniform protective film on a diaphragm surface and has excellent operational characteristics.;SOLUTION: The electrostatic actuator 2 has both a diaphragm 20 including a diaphragm electrode 22 and with the protective film 26 formed on the surface, and a fixed electrode 12 arranged opposed via a gap 14a to the diaphragm 20. The electrostatic actuator 2 is equipped with a communication path 56 which communicates with the gap 14a, a first open hole 55a and a second open hole 55b which open the communication path 56 into the atmosphere, a first sealing member 58a which seals the first open hole 55a, and a second sealing member 58b of a material different from that of the first sealing member 58a sealing the second open hole 55b.;COPYRIGHT: (C)2009,JPO&INPIT