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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps

机译:静电驱动隔膜式微型泵的非线性分析

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摘要

Diaphragm micropumps are the most common type among indirectly driven micropumps. The elastic diaphragm is deflected using a bias voltage and then driven to vibrate around its deflected position by a harmonic AC load to produce a flow rate. This paper investigates the nonlinear resonant behavior of a circular elastic diaphragm interacting with incompressible and inviscid liquids inside a cylindrical chamber containing a central discharge opening. The governing equations of the system are derived by taking into account the nonlinear electrostatic force and fluid pressure exerted upon the diaphragm which is formulated using the linear form of Bernoulli's equation. In the modeling stage, the kinematic and compatibility conditions are incorporated into the elastic vibration of the diaphragm. The method of multiple scales is used to obtain an approximate analytical solution to the nonlinear resonant curves of the transverse oscillation amplitudes. It is shown that, as the DC voltage increases, the system exhibits softening behavior. The results also show that decreasing the discharge diameter further bends the frequency response cure to left side, which is an indication of increase in the system nonlinearity. The effects of micropump chamber height on the frequency curves were also studied and showed that softening behavior increases with decreasing chamber height. In addition, it was found that the electrical and inertial properties of the operating fluid can change the resonant curves significantly.
机译:隔膜微型泵是间接驱动微型泵中最常见的类型。使用偏置电压使弹性膜片偏转,然后通过谐波AC负载驱动弹性膜片使其偏转位置周围振动,以产生流量。本文研究了一个圆形弹性膜片的非线性共振行为,该弹性膜片与包含中央排出口的圆柱形腔室内的不可压缩和不粘液体相互作用。通过考虑非线性静电力和施加在膜片上的流体压力得出系统的控制方程,该非线性静电力和流体压力是使用伯努利方程的线性形式制定的。在建模阶段,将运动学和相容性条件纳入膜片的弹性振动中。多尺度方法用于获得横向振荡幅度的非线性共振曲线的近似解析解。结果表明,随着直流电压的升高,系统表现出软化行为。结果还表明,减小放电直径会使频率响应固化进一步向左侧弯曲,这表明系统非线性度增加。还研究了微型泵腔室高度对频率曲线的影响,结果表明,软化行为随腔室高度的减小而增加。另外,已经发现工作流体的电和惯性性质可以显着改变共振曲线。

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