ELECTROSTATIC ACTUATOR, LIQUID DROPLET DISCHARGE HEAD, MANUFACTURING METHOD OF THE ELECTROSTATIC ACTUATOR, INK CARTRIDGE, INK JET RECORDING APPARATUS, MICROPUMP AND OPTICAL MODULATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which has high reliability and can print with high image quality at a low cost, by solving problems inherent in the electrostatic actuator having a gap formed by sacrificial layer etching, and to provide a liquid droplet discharge head, an ink cartridge integrated with the liquid droplet discharge head, and an ink jet recording apparatus mounted with the liquid droplet discharge head.;SOLUTION: In the electrostatic actuator which is mounted on a liquid droplet discharge head for discharging droplets and deforms a vibration plate 5 operate it, facing electrodes 4 are formed so as to be disposed oppositely via a gap for the vibrating plate, the gap is formed by sacrificial etching, and the vibration plate 5 transmits ultraviolet rays.;COPYRIGHT: (C)2008,JPO&INPIT