In tilt observation with a scanning charged particle beam apparatus equipped with an aberration corrector, resolution reduction due to chromatic spherical aberration is suppressed regardless of a specific optical system. The control unit of the scanning charged particle beam apparatus provides a method for measuring chromatic spherical aberration in the tilt observation of the sample, and further has a chromatic aberration control function in the tilt observation of the sample. In order to suppress blurring of the image that occurs in the direction parallel to the sample surface due to chromatic spherical aberration and chromatic aberration at an inclination angle (-t1) that is axially symmetric with the chromatic aberration control function, the chromatic aberration control function prevents chromatic aberration from being zero. Control to be positive or negative.
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