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READING CIRCUIT FOR A MULTI-AXIS MEMS GYROSCOPE HAVING DETECTION DIRECTIONS INCLINED WITH RESPECT TO THE REFERENCE AXES, AND CORRESPONDING MULTI-AXES MEMS GYROSCOPE
READING CIRCUIT FOR A MULTI-AXIS MEMS GYROSCOPE HAVING DETECTION DIRECTIONS INCLINED WITH RESPECT TO THE REFERENCE AXES, AND CORRESPONDING MULTI-AXES MEMS GYROSCOPE
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机译:具有相对于参考轴倾斜的检测方向的多轴MEMS陀螺仪的阅读电路,以及对应的多轴MEMS陀螺仪
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摘要
A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.
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