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DAMASCENE PROCESS FOR ALIGNING AND BONDING THROUGH-SILICON-VIA BASED 3D INTEGRATED CIRCUIT STACKS
DAMASCENE PROCESS FOR ALIGNING AND BONDING THROUGH-SILICON-VIA BASED 3D INTEGRATED CIRCUIT STACKS
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机译:通过硅-VIA对3D集成电路堆栈进行对齐和绑定的DAMASCENE过程
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摘要
Through-silicon-via (TSV) based 3D integrated circuit (3D IC) stacks are aligned, bonded and electrically interconnected using a transparent alignment material in the TSVs until the wafers are bonded. Embodiments include providing a first wafer having a first device layer and at least one first TSV filled with a conductive material, providing a second wafer having a second device layer, forming at least one second TSV in the second wafer, filling each second TSV with an alignment material, thinning the second wafer until the transparent material extends all the way through the wafer, aligning the first and second wafers, bonding the first and second wafers, removing the alignment material from the second wafer, and filling each second TSV in the second wafer with a conductive material.
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