A method of manufacturing a microfluid mixer includes pouring a ceramic precursor into a first mold, a second mold and a third mold. The first mold forms a base plate, the second mold forms a top plate, and the third mold forms a first plate. The ceramic precursors are gelled in the first mold, the second mold and the third mold to form a green base plate, a green top plate and a green first plate. The plates are removed from the respective molds. The green base plate, the green top plate, and the green first plate are co-fired to form a ceramic base plate, a ceramic top plate and a ceramic first plate. The ceramic base plate is interlocked with the ceramic top plate and the ceramic first plate, and a diaphragm is disposed upon one of the first plate and the top plate.
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