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Self-exciting, self-sensing piezoelectric cantilever sensor

机译:自激,自感应压电悬臂传感器

摘要

A piezoelectric cantilever sensor includes a piezoelectric layer and a non-piezoelectric layer, a portion of which is attached to the piezoelectric layer. In one embodiment, one end of the non-piezoelectric layer extends beyond the end of piezoelectric layer to provide an overhang. The overhang piezoelectric cantilever sensor enables increased sensitivity allowing application of the device in more viscous environments, such as liquid media, as well as application in liquid media at higher flow rates than conventional piezoelectric cantilevers. In another embodiment, the sensor includes first and second bases and at least one of the piezoelectric layer and the non-piezoelectric layer is affixed to each of the first and second bases to form the piezoelectric cantilever sensor. In this embodiment, the sensor is robust and exhibits excellent sensing characteristics in both gaseous and liquid media, even when subjected to relatively high flow rates.
机译:压电悬臂传感器包括压电层和非压电层,非压电层的一部分附接到压电层。在一实施例中,非压电层的一端延伸超过压电层的一端以提供悬垂。悬臂式压电悬臂传感器能够提高灵敏度,从而允许将该设备应用到更粘稠的环境中,例如液体介质,以及以比传统压电悬臂更高的流速在液体介质中应用。在另一个实施例中,传感器包括第一和第二基座,并且压电层和非压电层中的至少一个固定到第一和第二基座中的每个,以形成压电悬臂梁传感器。在该实施例中,传感器即使在相对较高的流速下也很坚固并且在气态和液态介质中均表现出出色的感测特性。

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