A piezoelectric cantilever sensor includes a piezoelectric layer and a non-piezoelectric layer, a portion of which is attached to the piezoelectriclayer. In one embodiment, one end of the non-piezoelectric layer extendsbeyond the end of piezoelectric layer to provide an overhang. The overhangpiezoelectric cantilever sensor enables increased sensitivity allowingapplication of the device in more viscous environments, such as liquid media,as well as application in liquid media at higher flow rates than conventionalpiezoelectric cantilevers. In another embodiment, the sensor includes firstand second bases and at least one of the piezoelectric layer and the non-piezoelectric layer is affixed to each of the first and second bases to formthe piezoelectric cantilever sensor. In this embodiment, the sensor is robustand exhibits excellent sensing characteristics in both gaseous and liquidmedia, even when subjected to relatively high flow rates.
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