首页> 外国专利> Semiconductor Device and Method of Forming a Metallurgical Interconnection Between a Chip and a Substrate in a Flip Chip Package

Semiconductor Device and Method of Forming a Metallurgical Interconnection Between a Chip and a Substrate in a Flip Chip Package

机译:倒装芯片封装中形成芯片和衬底之间的冶金互连的半导体器件和方法

摘要

A method for forming metallurgical interconnections and polymer adhesion of a flip chip to a substrate includes providing a chip having a set of bumps formed on a bump side thereof and a substrate having a set of interconnect points on a metallization thereon, providing a measured quantity of a polymer adhesive in a middle region of the chip on the bump side, aligning the chip with the substrate so that the set of bumps aligns with the set of interconnect points, pressing the chip and the substrate toward one another so that a portion of the polymer adhesive contacts the substrate and the bumps contact the interconnect points, and heating the bumps to a temperature sufficiently high to form a metallurgical connection between the bumps and the interconnect points.
机译:一种形成金属互连和倒装芯片对衬底的聚合物粘附的方法,包括提供具有在其凸块侧上形成的一组凸块的芯片和在其金属化层上具有一组互连点的衬底,提供测量量的在凸块侧的芯片的中间区域中的聚合物粘合剂,将芯片与衬底对准,从而使凸块与互连点对对准,将芯片和衬底彼此压在一起,从而使一部分聚合物粘合剂接触衬底,并且凸点接触互连点,并将凸点加热到足够高的温度,以在凸点和互连点之间形成冶金连接。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号